TETRAKIS(DIMETHYLAMIDO)TITANIUM(IV) 99.999% (C005B-032853)

General description

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Application

Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

Molecular Weight: 224.17. Empirical Formula: C₈H₂₄N₄Ti. linearFormula: [(CH₃)₂N]₄Ti. Quality Level: 200. Assay: 99.999% trace metals basis. form: liquid. reaction suitability: core: titanium. bp: 50 . °C/0.5 . mmHg (lit.). density: 0.947 . g/mL . at 25 . °C (lit.). SMILES string: CN(C)[Ti](N(C)C)(N(C)C)N(C)C. InChI: 1S/4C2H6N.Ti/c4*1-3-2. /h4*1-2H3. /q4*-1. +4. InChI key: MNWRORMXBIWXCI-UHFFFAOYSA-N. Pictograms: GHS02,GHS05. Signal Word: Danger. Hazard Statements: H225 - H260 - H314. Precautionary Statements: P210 - P223 - P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338. Hazard Classifications: Flam. Liq. 2 - Skin Corr. 1B - Water-react 1. Supp Hazards: EUH014. Storage Class Code: 4.3 - Hazardous materials, which set free flammable gases upon contact with water. WGK: WGK 3. Flash Point(F): -22.0 °F - closed cup. Flash Point(C): -30 °C - closed cup. Personal Protective Equipment: Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter.